On the mechanical behavior of a wide tunable capacitive MEMS resonator for low frequency energy harvesting applications

标题
On the mechanical behavior of a wide tunable capacitive MEMS resonator for low frequency energy harvesting applications
作者
关键词
-
出版商
Springer Science and Business Media LLC
发表日期
2020-02-14
DOI
10.1007/s00542-020-04779-9

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