Deep reactive ion etching of ‘grass-free’ widely-spaced periodic 2D arrays, using sacrificial structures

标题
Deep reactive ion etching of ‘grass-free’ widely-spaced periodic 2D arrays, using sacrificial structures
作者
关键词
-
出版物
MICROELECTRONIC ENGINEERING
Volume 223, Issue -, Pages 111228
出版商
Elsevier BV
发表日期
2020-01-21
DOI
10.1016/j.mee.2020.111228

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