Ionization-induced annealing in silicon upon dual-beam irradiation

标题
Ionization-induced annealing in silicon upon dual-beam irradiation
作者
关键词
-
出版物
JOURNAL OF MATERIALS SCIENCE
Volume 55, Issue 14, Pages 5938-5947
出版商
Springer Science and Business Media LLC
发表日期
2020-02-08
DOI
10.1007/s10853-020-04399-8

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