Silicon Oxycarbide Platform for Integrated Photonics

标题
Silicon Oxycarbide Platform for Integrated Photonics
作者
关键词
-
出版物
JOURNAL OF LIGHTWAVE TECHNOLOGY
Volume 38, Issue 4, Pages 784-791
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2019-10-23
DOI
10.1109/jlt.2019.2948999

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