Effect of ion implantation on material removal mechanism of 6H-SiC in nano-cutting: A molecular dynamics study

标题
Effect of ion implantation on material removal mechanism of 6H-SiC in nano-cutting: A molecular dynamics study
作者
关键词
-
出版物
COMPUTATIONAL MATERIALS SCIENCE
Volume 174, Issue -, Pages 109476
出版商
Elsevier BV
发表日期
2019-12-17
DOI
10.1016/j.commatsci.2019.109476

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