Article
Engineering, Electrical & Electronic
Yuji Ando, Ryutaro Makisako, Hidemasa Takahashi, Akio Wakejima, Jun Suda
Summary: The study revealed that the epitaxial layer structure affects the electrical characteristics of AlGaN/GaN HEMTs. GaN-on-GaN HEMTs showed an improved tradeoff between maximum drain current and breakdown characteristics compared to GaN-on-SiC HEMTs. Moreover, the impact of Fe diffusion on frequency dispersion was relatively limited in GaN-on-GaN devices.
IEEE TRANSACTIONS ON ELECTRON DEVICES
(2022)
Article
Engineering, Electrical & Electronic
Ankit Soni, Mayank Shrivastava
Summary: This study investigated the impact of various charge sources on the electric field distribution and breakdown mechanism of HEMTs, revealing strong correlations between different charges and breakdown voltage. Insights were developed to explain the dependence of HEMT breakdown on surface states, polarization charge, and buffer traps, aiding in the design of efficient surface passivation schemes.
IEEE TRANSACTIONS ON ELECTRON DEVICES
(2021)
Article
Instruments & Instrumentation
Pengfei Wan, Jianqun Yang, Hao Jiang, Yadong Wei, Kai Wang, Weiqi Li, Ling Lv, Xingji Li
Summary: This paper identifies the location of the EC-0.9 eV trap caused by irradiation in AlGaN/GaN-HEMTs. The 40 keV He ions only cause damage in the passivation and AlGaN layer, while the 400 keV He ions mainly cause damage in the GaN layer. Test results show that the threshold voltage of the device shifts positively after 400 keV He ion irradiation, and the carrier mobility and Schottky barrier decrease. DLTS results reveal a defect with EC-0.9 eV in the GaN layer after irradiation. Combined with DLTS and TCAD simulation, it is determined that the location of the EC-0.9 eV defects caused by displacement damage is in the GaN layer.
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
(2023)
Article
Engineering, Electrical & Electronic
Md. Tasnim Azad, Toiyob Hossain, Bejoy Sikder, Qingyun Xie, Mengyang Yuan, Eiji Yagyu, Koon Hoo Teo, Tomas Palacios, Nadim Chowdhury
Summary: This work proposes a multimetal gated architecture to improve the linearity of AlGaN/GaN HEMT. Through experimental and simulation analysis, it is found that using different gate metals can reduce the value of third-order transconductance. The proposed device exhibits better compression point, saturation output power, and power added efficiency, and shows excellent linearity performance under deep class AB bias.
IEEE TRANSACTIONS ON ELECTRON DEVICES
(2023)
Article
Chemistry, Physical
Cheng-Yu Huang, Soumen Mazumder, Pu-Chou Lin, Kuan-Wei Lee, Yeong-Her Wang
Summary: In this paper, a metal-oxide-semiconductor high-electron-mobility transistor (MOS-HEMT) is proposed to suppress gate leakage current, decrease flicker noise, increase high-frequency performance, improve power performance, and enhance stability. This is achieved by using a Al2O3/ZrO2 stacked layer on a conventional AlGaN/GaN HEMT.
Article
Engineering, Electrical & Electronic
Junao Cheng, Mohammad Wahidur Rahman, Andy Xie, Hao Xue, Shahadat Hasan Sohel, Edward Beam, Cathy Lee, Hao Yang, Caiyu Wang, Yu Cao, Siddharth Rajan, Wu Lu
Summary: In this study, ScAlN/GaN dielectric superjunction high-electron-mobility transistors with high-k passivation layer BZN were demonstrated to enhance breakdown voltage. The use of SiN/BZN/SiN sandwiched passivation layer improved the average breakdown voltage while maintaining similar fT and fmax values. This work shows that high current and high breakdown voltage can be achieved simultaneously on semiconductor heterostructures with high sheet charge density by integrating high-k dielectrics.
IEEE TRANSACTIONS ON ELECTRON DEVICES
(2021)
Article
Engineering, Electrical & Electronic
Pei-Yu Wu, Ting-Chang Chang, Ming-Chen Chen, Hao-Xuan Zheng, Yu-Shan Lin, Xin-Ying Tsai, Kuo-Jen Chang, Wei-Cheng Kuo, Chao-Wei Lin, Guan-Shian Liu, Tsung-Ming Tsai
Summary: This study investigated the improvement in electrical performance of AlGaN/GaN transistors through annealing (ANL) treatment post supercritical fluid nitridation (SCFN) treatment, which resulted in decreased gate current leakage and increased device reliability. The analysis of negative bias voltage stress (NBS) confirmed the significant reduction in degradation of the ANL-SCFN device, showing improved switching characteristics due to decreased OFF-state leakage caused by the ANL treatment.
IEEE TRANSACTIONS ON ELECTRON DEVICES
(2021)
Article
Chemistry, Analytical
Idriss Abid, Youssef Hamdaoui, Jash Mehta, Joff Derluyn, Farid Medjdoub
Summary: We report on the fabrication and electrical characterization of AlGaN/GaN normally off transistors on silicon designed for high-voltage operation. The normally off configuration was achieved with a p-gallium nitride (p-GaN) cap layer below the gate, enabling a positive threshold voltage higher than +1 V. The buffer structure was based on AlN/GaN superlattices (SLs), delivering a vertical breakdown voltage close to 1.5 kV with a low leakage current all the way to 1200 V.
Article
Physics, Applied
Chih-Yao Chang, Yao-Luen Shen, Shun-Wei Tang, Tian-Li Wu, Wei-Hung Kuo, Suh-Fang Lin, Yuh-Renn Wu, Chih-Fang Huang
Summary: In this study, a novel etching buffer layer was designed and incorporated into the p-GaN/AlGaN/GaN high electron mobility transistor structure to improve the etching process. The results showed that the device with the buffer layer exhibited improved process uniformity and device performance.
APPLIED PHYSICS EXPRESS
(2022)
Article
Engineering, Electrical & Electronic
Jiayou Wang, Yi Huang, Yin-Cheng Chang, Yeke Liu, Da-Chiang Chang, Shawn S. H. Hsu
Summary: This paper proposes a monolithic microwave integrated circuit (MMIC) cross-coupled oscillator with high operating frequency and high output power using 0.25-mu m gallium nitride (GaN) high electron mobility transistor (HEMT) technology. The coupling capacitors in the core circuit are analyzed for high output power with a suitable tank inductor. A flip-transistor layout with a shared back via is proposed for reduced interconnect loss and a compact layout. The measured results show a maximum output power of 16 dBm at 24.3 GHz, and a phase noise (PN) of -137.9 dBc/Hz at a 10-MHz offset, with a chip area of only 0.71 mm(2).
IEEE MICROWAVE AND WIRELESS TECHNOLOGY LETTERS
(2023)
Article
Engineering, Electrical & Electronic
Chunzhou Shi, Ling Yang, Meng Zhang, Mei Wu, Bin Hou, Hao Lu, Fuchun Jia, Fei Guo, Wenliang Liu, Qian Yu, Xiaohua Ma, Yue Hao
Summary: This article demonstrates the superior power performance of a double-channel high-electron-mobility transistor (HEMT) operated at a high drain voltage in the sub-6 GHz range. The double channel with graded barrier HEMT (DCGB-HEMT) shows better direct current characteristics compared to the single channel HEMT (SC-HEMT), including a wider gate voltage swing, higher saturation current, and higher OFF-state breakdown voltage. Through TCAD simulation, it is found that the graded barrier in DCGB-HEMT reduces the peak electric field, resulting in increased breakdown voltage. Furthermore, DCGB-HEMT exhibits improved current collapse and power-added efficiency (PAE) due to better gate control and reduced leakage at high drain voltage.
IEEE TRANSACTIONS ON ELECTRON DEVICES
(2023)
Article
Engineering, Electrical & Electronic
Jeong-Gil Kim, Chuyoung Cho, Eunjin Kim, Jae Seok Hwang, Kyung-Ho Park, Jung-Hee Lee
Summary: AlGaN/GaN HEMT grown on high-quality AlN buffer layer exhibits low OFF-state leakage current and high I-ON/I-OFF, with the undoped AlN buffer layer effectively suppressing trapping effects and reducing current dispersion in pulsed characteristics. The device also demonstrates high breakdown voltage and excellent figure of merit, showing promise for high-performance RF and power applications.
IEEE TRANSACTIONS ON ELECTRON DEVICES
(2021)
Article
Engineering, Electrical & Electronic
C. Liu, Y. Q. Chen, Y. Liu, P. Lai, Z. Y. He, Y. F. En, T. Y. Wang, Y. Huang
Summary: This work investigates the degradation behavior and physical mechanism of AIGaN/GaN HEMTs under hot-electron stress in hydrogen and nitrogen atmosphere, showing that degradation in hydrogen atmosphere is more severe. Experimental results and COMSOL finite-element simulations support this conclusion.
IEEE TRANSACTIONS ON ELECTRON DEVICES
(2021)
Article
Physics, Applied
Xin Chen, Yaozong Zhong, Shumeng Yan, Xiaolu Guo, Hongwei Gao, Xiujian Sun, Haodong Wang, Fangqing Li, Yu Zhou, Meixin Feng, Ercan Yilmaz, Qian Sun, Hui Yang
Summary: The characteristics of an AlGaN/GaN high-electron-mobility transistor buffer structure are studied and optimized by employing an AlN/GaN superlattice (SL) structure. The influence of buffer traps on carrier transport behaviors and electrical performance for SL buffer structures under a high electric field is analyzed. The AlN/GaN SL buffer structures are further optimized with various AlN/GaN thickness ratios and their total thickness, achieving a high breakdown voltage and suppressing the buffer trapping effect.
JOURNAL OF PHYSICS D-APPLIED PHYSICS
(2023)
Article
Materials Science, Multidisciplinary
Yijun Dai, Zihui Zhao, Tian Luo, Zhehan Yu, Li Chen, Wei Guo, Jichun Ye
Summary: This article demonstrates the polarization-induced self-isolation in AlGaN/GaN high-electron-mobility transistors (HEMTs) through the incorporation of lateral-polarity structures (LPS). The incorporation of LPS leads to the formation of a 2D electron gas (2DEG) in the III-polar heterojunction and depletion in the N-polar counterpart. The introduction of LPS provides a novel planar isolation technique with improved device performance by eliminating the isolation leakage path.
PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS
(2023)
Article
Materials Science, Multidisciplinary
Harpreet Kaur, Rajesh Sharma, T. Laurent, J. Torres, P. Nouvel, C. Palermo, L. Varani, Y. Cordier, M. Chmielowska, J-P Faurie, B. Beaumont
Summary: The study investigates the transport measurements of GaN/AlGaN structures to explore the possibility of amplifying terahertz radiations. Different structures, such as HEMT, TLM, and IDF, are investigated, revealing the effects of geometry, temperature, and operating conditions. The results provide valuable information for achieving terahertz amplification in electronic devices.
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
(2022)
Article
Chemistry, Analytical
Gaudencio Paz-Martinez, Ignacio Iniguez-de-la-Torre, Hector Sanchez-Martin, Jose Antonio Novoa-Lopez, Virginie Hoel, Yvon Cordier, Javier Mateos, Tomas Gonzalez
Summary: The responsivity of AlGaN/GaN high-electron mobility transistors (HEMTs) as zero-bias RF detectors in the subthreshold regime varies depending on the operating temperature and gate length. By characterizing the detection performance of HEMTs with different gate lengths (75-250 nm) at temperatures ranging from 8 K to 400 K, we found that the different behaviors observed can be explained by the presence or absence of gate-leakage current and temperature effects related to the ionization of bulk traps.
Article
Engineering, Electrical & Electronic
Thi Huong Ngo, Remi Comyn, Sebastien Chenot, Julien Brault, Benjamin Damilano, Stephane Vezian, Eric Frayssinet, Flavien Cozette, Nicolas Defrance, Francois Lecourt, Nathalie Labat, Hassan Maher, Yvon Cordier
Summary: We present the fabrication process of an enhancement mode p-GaN/AlN/GaN high electron mobility transistor using selective area sublimation under vacuum. The selectivity of GaN evaporation is demonstrated on the thin 2 nm AlN barrier layer. Additionally, the regrowth of AlGaN is crucial for increasing the maximum drain current and enabling co-integration with depletion mode devices.
SOLID-STATE ELECTRONICS
(2022)
Article
Physics, Applied
Julien Bassaler, Remi Comyn, Catherine Bougerol, Yvon Cordier, Farid Medjdoub, Philippe Ferrandis
Summary: This study focuses on the material investigation of an Al0.9Ga0.1N/GaN heterostructure, identifying various defects in the GaN channel that may contribute to reduced mobility and are linked to the quality of the channel interfaces.
JOURNAL OF APPLIED PHYSICS
(2022)
Article
Physics, Applied
B. Orfao, G. Di Gioia, B. G. Vasallo, S. Perez, J. Mateos, Y. Roelens, E. Frayssinet, Y. Cordier, M. Zaknoune, T. Gonzalez
Summary: A model to predict the ideal reverse leakage currents in Schottky barrier diodes was developed and tested using current-voltage-temperature measurements. The model achieved excellent agreement with measured forward-bias I-V curves in GaN diodes. Image-charge effects were shown to be important for accurately predicting reverse leakage current values.
JOURNAL OF APPLIED PHYSICS
(2022)
Article
Chemistry, Analytical
Idriss Abid, Youssef Hamdaoui, Jash Mehta, Joff Derluyn, Farid Medjdoub
Summary: We report on the fabrication and electrical characterization of AlGaN/GaN normally off transistors on silicon designed for high-voltage operation. The normally off configuration was achieved with a p-gallium nitride (p-GaN) cap layer below the gate, enabling a positive threshold voltage higher than +1 V. The buffer structure was based on AlN/GaN superlattices (SLs), delivering a vertical breakdown voltage close to 1.5 kV with a low leakage current all the way to 1200 V.
Article
Chemistry, Analytical
Kathia Harrouche, Srisaran Venkatachalam, Lyes Ben-Hammou, Francois Grandpierron, Etienne Okada, Farid Medjdoub
Summary: This paper presents an enhancement of mm-wave power performances using a vertically scaled AlN/GaN heterostructure. The introduction of an AlGaN back barrier underneath a non-intentionally doped GaN channel layer prevents punch-through effects and drain leakage current, while maintaining a moderate carbon concentration in the buffer layer. By carefully tuning the Al concentration in the back barrier layer, the optimized heterostructure provides electron confinement and low trapping effects up to high drain bias for a gate length as short as 100 nm. Load-Pull measurements at 40 GHz showed outstanding performances with a record power-added efficiency of 70% (66%) under high output power density at V-DS = 20 V. These results demonstrate the potential of this approach for future millimeter-wave applications.
Article
Engineering, Electrical & Electronic
Quentin Fornasiero, Nicolas Defrance, Sylvie Lepilliet, Vanessa Avramovic, Yvon Cordier, Eric Frayssinet, Marie Lesecq, Nadir Idir, Jean-Claude De Jaeger
Summary: This paper presents Schottky contacts on fluorine implanted AlGaN/GaN heterostructures that exhibit an ideality factor close to unity and low on-voltage threshold. A comparison is made between a sample with SF6 plasma anode pretreatment followed by low-temperature annealing and a nonannealed sample. Physical-model parameters are extracted to understand the conduction mechanisms involved in annealed diodes, showing better DC performances than their nonannealed counterparts. Annealing reduces the ideality factor, indicating field-enhanced thermionic emission as the main conduction mechanism, and decreases the tunneling reverse current leakage, which is attributed to the recovery of plasma-induced damages.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
(2023)
Article
Physics, Applied
Reda Elwaradi, Jash Mehta, Thi Huong Ngo, Maud Nemoz, Catherine Bougerol, Farid Medjdoub, Yvon Cordier
Summary: In this study, two series of AlGaN/GaN/AlN high electron mobility transistor (HEMT) heterostructures were grown using molecular beam epitaxy. The effects of reducing the GaN channel thickness and varying the AlGaN barrier thickness and composition on the structural and electrical properties of the heterostructures were investigated. Material analysis techniques such as high-resolution x-ray diffraction, atomic force microscopy, and cross-sectional transmission electron microscopy were employed. The results showed that reducing the GaN channel thickness led to a decrease in GaN strain relaxation rate, but also caused degradation in crystal quality and electron mobility, along with an increase in sheet resistance. However, a trade-off was observed for a specific HEMT structure with a 50 nm width GaN channel, which exhibited a moderate sheet resistance and a high three-terminal breakdown voltage.
JOURNAL OF APPLIED PHYSICS
(2023)
Article
Physics, Applied
Zeyu Chi, Tamar Tchelidze, Corinne Sartel, Tsotne Gamsakhurdashvili, Ismail Madaci, Hayate Yamano, Vincent Sallet, Yves Dumont, Amador Perez-Tomas, Farid Medjdoub, Ekaterine Chikoidze
Summary: Spinel zinc gallate ZnGa2O4 is a ternary complex oxide with the widest gap where bipolar conductivity has been demonstrated among emerging ultra-wide bandgap semiconductors. This study used metal organic chemical vapor deposition to grow highly resistive p-type ZnGa2O4 thin films on sapphire and Si substrates to determine its critical electric field and vertical breakdown voltage. The average E-CR was estimated to be at least 5.3 MV cm(-1), which is significantly larger than SiC and GaN.
JOURNAL OF PHYSICS D-APPLIED PHYSICS
(2023)
Article
Nanoscience & Nanotechnology
Caroline Elias, Maud Nemoz, Helene Rotella, Frederic Georgi, Stephane Vezian, Maxime Hugues, Yvon Cordier
Summary: For the first time, ScAlN growth has been carried out by molecular beam epitaxy using ammonia as the nitrogen precursor. The study shows that smooth surface morphology with a mean roughness below 0.5 nm can be achieved at any growth temperature. X-ray diffraction rocking curves indicate minimum full-width at half-maximum of 620 and 720 arc sec for (0002) and (1013) crystal planes at a temperature of 670°C. Additionally, high-density two-dimensional electron gases of 3-3.5 x 10(13)/cm(2) were observed in the heterostructures grown below 720°C.
Article
Crystallography
Atse Julien Eric N'Dohi, Camille Sonneville, Soufiane Saidi, Thi Huong Ngo, Philippe De Mierry, Eric Frayssinet, Yvon Cordier, Luong Viet Phung, Frederic Morancho, Hassan Maher, Dominique Planson
Summary: In this study, the physical and electrical properties of vertical GaN Schottky diodes were examined using various characterization techniques including cathodoluminescence (CL), micro-Raman spectroscopy, SIMS, and current-voltage (I-V) measurements. The results indicated the presence of dislocations and other structural defects in the diode epilayer. Furthermore, it was observed that the leakage current in the reverse biased diodes was primarily influenced by short range non-uniformities of the effective doping rather than strain fluctuation induced by dislocations.
Article
Computer Science, Information Systems
Elodie Carneiro, Stephanie Rennesson, Sebastian Tamariz, Kathia Harrouche, Fabrice Semond, Farid Medjdoub
Summary: Sub-micron-thick AlN/GaN transistors (HEMTs) grown on a silicon substrate for high-frequency power applications were reported. An innovative ultrathin step-graded buffer with a total stack thickness of 450 nm was used, which enabled excellent electron confinement and low leakage current. State-of-the-art GaN-on-silicon power performances were achieved at 40 GHz, with a combination of high power-added efficiency and saturated output power density. This is the first demonstration of high RF performance achieved with sub-micron-thick GaN HEMTs grown on a silicon substrate.