Physically-based modeling of pad-asperity scale chemical-mechanical synergy in chemical mechanical polishing

标题
Physically-based modeling of pad-asperity scale chemical-mechanical synergy in chemical mechanical polishing
作者
关键词
-
出版物
TRIBOLOGY INTERNATIONAL
Volume 138, Issue -, Pages 307-315
出版商
Elsevier BV
发表日期
2019-05-31
DOI
10.1016/j.triboint.2019.05.046

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