期刊
MECHANICAL SYSTEMS AND SIGNAL PROCESSING
卷 141, 期 -, 页码 -出版社
ACADEMIC PRESS LTD- ELSEVIER SCIENCE LTD
DOI: 10.1016/j.ymssp.2019.106476
关键词
Bionic sensor; Radial field piezoelectric diaphragm; Underwater sensing; Micro-fabrication
资金
- National Natural Science Foundation of China [51677043]
- China Scholarship Council [201706120130]
Inspired by the ubiquitous lateral-line system of fish which plays an essential role in flow sensing and object detection, this paper presents a new sensor consisting of a radial field piezoelectric diaphragm in d(33) mode and a high aspect ratio pillar. Finite element analysis was conducted to simulate the in-plane poling released by inter-circulating electrodes and the vibration behavior of the sensor. Prototypes were fabricated by microfabrication combined with 3D printing. Impedance spectrums were examined to characterize the dynamic behaviors of the sensor. By utilizing a vibrating sphere to imitate the underwater disturbances, the performance of the sensor in sensing oscillatory flows was tested. Experimental results demonstrate that the sensor has a high sensitivity of 2.476 mV/(mm/s) and very good response ability to the low frequency hydrodynamic flow phenomena. Besides, the ability of the sensor in locating the vibrating sphere was illustrated. This sensor is miniaturized, light-weight, self-powered and low-cost. It provides a good prospect for the underwater sensing of autonomous underwater vehicles. (C) 2019 Elsevier Ltd. All rights reserved.
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