Grain Size Engineering of Ferroelectric Zr-doped HfO2 for the Highly Scaled Devices Applications

出版年份 2019 全文链接

标题

作者

关键词

出版物

Volume 40, Issue 11, Pages 1868-1871

出版商

Institute of Electrical and Electronics Engineers (IEEE)

发表日期

2019-10-01

DOI

10.1109/led.2019.2944491

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