Investigation on polarization characteristics of ferroelectric memories with thermally stable hafnium aluminum oxides

标题
Investigation on polarization characteristics of ferroelectric memories with thermally stable hafnium aluminum oxides
作者
关键词
Ferroelectric, HfAlO, x, Thermal stability, Endurance cycling, Domain pinning
出版物
VACUUM
Volume 166, Issue -, Pages 11-14
出版商
Elsevier BV
发表日期
2019-04-25
DOI
10.1016/j.vacuum.2019.04.045

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