Numerical analysis of anchor loss and thermoelastic damping in piezoelectric AlN-on-Si Lamb wave resonators

Wide Acoustic Bandgap Solid Disk-Shaped Phononic Crystal Anchoring Boundaries for Enhancing Quality Factor in AlN-on-Si MEMS Resonators

(2018) Muhammad Siddiqi et al.   Micromachines

Thermoelastic Damping in the Electrodes Determines $Q$ of AlN Contour Mode Resonators

(2017) Jeronimo Segovia-Fernandez et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Applying laser Doppler vibrometry to probe anchor losses in MEMS AlN-on-Si contour mode resonators

(2017) C. Tu et al.   SENSORS AND ACTUATORS A-PHYSICAL

Analytical and Numerical Methods to Model Anchor Losses in 65-MHz AlN Contour Mode Resonators

(2016) Jeronimo Segovia-Fernandez et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Effects of cryogenic cooling on the quality factor of lamb wave mode aluminium nitride piezoelectric-on-silicon MEMS resonators

(2016) C. Tu et al.   SENSORS AND ACTUATORS A-PHYSICAL

Anchor Losses in AlN Contour Mode Resonators

(2015) Jeronimo Segovia-Fernandez et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Validation of PML-based models for the evaluation of anchor dissipation in MEMS resonators

(2012) A. Frangi et al.   EUROPEAN JOURNAL OF MECHANICS A-SOLIDS

Analysis of anchor and interface losses in piezoelectric MEMS resonators

(2012) A. Frangi et al.   SENSORS AND ACTUATORS A-PHYSICAL

Comparison of high-order absorbing boundary conditions and perfectly matched layers in the frequency domain

(2010) Daniel Rabinovich et al.   International Journal for Numerical Methods in Biomedical Engineering

What is the Young's Modulus of Silicon?

(2010) Matthew A. Hopcroft et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Thin-film piezoelectric-on-silicon resonators for high-frequency reference oscillator applications

(2009) R. Abdolvand et al.   IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL

Gmsh: A 3-D finite element mesh generator with built-in pre- and post-processing facilities

(2009) Christophe Geuzaine et al.   INTERNATIONAL JOURNAL FOR NUMERICAL METHODS IN ENGINEERING

Piezoelectric-on-Silicon Lateral Bulk Acoustic Wave Micromechanical Resonators

(2008) G.K. Ho et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Solid damping in micro electro mechanical systems

(2008) Raffaele Ardito et al.   MECCANICA