A low-temperature and short-annealing process for metal oxide thin film transistors using deep ultraviolet light for roll-to-roll processing

出版年份 2019 全文链接

标题

作者

关键词

Thin film transistor, Semiconductor, Deep ultraviolet, Printed electronics, Light irradiation, Low-temperature annealing

出版物

Volume 19, Issue 8, Pages 954-960

出版商

Elsevier BV

发表日期

2019-05-14

DOI

10.1016/j.cap.2019.02.004

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