期刊
NATURE REVIEWS MATERIALS
卷 4, 期 7, 页码 497-507出版社
NATURE PORTFOLIO
DOI: 10.1038/s41578-019-0118-z
关键词
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资金
- Laboratory Directed Research and Development program of Oak Ridge National Laboratory
- Oak Ridge National Laboratory's Center for Nanophase Materials Sciences (CNMS), a U.S. Department of Energy Office of Science
- U.S. Department of Energy, Office of Science, Basic Energy Sciences, Division of Materials Science and Engineering
Assembling matter atom-by-atom into functional devices is the ultimate goal of nanotechnology. The possibility of achieving this goal is intrinsically dependent on the ability to visualize matter at the atomic level, induce and control atomic-scale motion, facilitate and direct chemical reactions, and coordinate and guide fabrication processes towards desired structures atom-by-atom. In this Perspective, we summarize recent progress in chemical transformations, material alterations and atomic dynamics studies enabled by the converged, atomic-sized electron beam of an aberration-corrected scanning transmission electron microscope. We discuss how such top-down observations have led to the concept of controllable, beam-induced processes and then of bottom-up, atom-by-atom assembly via electron-beam control. The progress in this field, from electron-beam-induced material transformations to atomically precise doping and multi-atom assembly, is reviewed, as are the associated engineering, theoretical and big-data challenges.
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