期刊
NATURE COMMUNICATIONS
卷 10, 期 -, 页码 -出版社
NATURE PUBLISHING GROUP
DOI: 10.1038/s41467-019-09868-6
关键词
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资金
- National Science Foundation [ECCS-1408490, ECCS-1509560]
- Office of Naval Research [N000141512217, N000141712494, N000141612655]
- Multi University Research Initiative (MURI) program from Air Force Office of Scientific Research [FA9550-16-1-0566]
- U.S. Department of Defense (DOD) [N000141612655, N000141712494, N000141512217] Funding Source: U.S. Department of Defense (DOD)
The ability to sense terahertz waves in a chip-scale technology operable at room temperature has potential for transformative applications in chemical sensing, biomedical imaging, spectroscopy and security. However, terahertz sensors are typically limited in their responsivity to a narrow slice of the incident field properties including frequency, angle of incidence and polarization. Sensor fusions across these field properties can revolutionize THz sensing allowing robustness, versatility and real-time imaging. Here, we present an approach that incorporates frequency, pattern and polarization programmability into a miniaturized chip-scale THz sensor. Through direct programming of a continuous electromagnetic interface at deep subwavelength scales, we demonstrate the ability to program the sensor across the spectrum (0.1-1.0 THz), angle of incidence and polarization simultaneously in a single chip implemented in an industry standard 65-nm CMOS process. The methodology is compatible with other technology substrates that can allow extension of such programmability into other spectral regions.
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