标题
Synthesis of nanopowders in a PECVD reactor from organosilicon precursor
作者
关键词
-
出版物
PHOSPHORUS SULFUR AND SILICON AND THE RELATED ELEMENTS
Volume -, Issue -, Pages 1-5
出版商
Informa UK Limited
发表日期
2019-06-22
DOI
10.1080/10426507.2019.1631311
参考文献
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