Effect of residual stress on the microstructure of GaN epitaxial films grown by pulsed laser deposition

标题
Effect of residual stress on the microstructure of GaN epitaxial films grown by pulsed laser deposition
作者
关键词
GaN, Pulsed laser deposition, Stress-free, Surface roughness, Crystalline quality
出版物
APPLIED SURFACE SCIENCE
Volume 369, Issue -, Pages 414-421
出版商
Elsevier BV
发表日期
2016-02-07
DOI
10.1016/j.apsusc.2016.02.044

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