Electrical evaluation of crack generation in SiN x and SiO x N y thin-film encapsulation layers for OLED displays

标题
Electrical evaluation of crack generation in SiN x and SiO x N y thin-film encapsulation layers for OLED displays
作者
关键词
OLED, Encapsulation, Leakage current density, Water vapor transmission rate, Crack density
出版物
APPLIED SURFACE SCIENCE
Volume 370, Issue -, Pages 126-130
出版商
Elsevier BV
发表日期
2016-02-18
DOI
10.1016/j.apsusc.2016.02.142

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