Decorative black TiC x O y film fabricated by DC magnetron sputtering without importing oxygen reactive gas

标题
Decorative black TiC x O y film fabricated by DC magnetron sputtering without importing oxygen reactive gas
作者
关键词
TiC, , O, , coatings, Decorative black films, DC magnetron sputtering
出版物
APPLIED SURFACE SCIENCE
Volume 364, Issue -, Pages 69-74
出版商
Elsevier BV
发表日期
2015-12-13
DOI
10.1016/j.apsusc.2015.12.009

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