Influence of absolute argon and oxygen flow values at a constant ratio on the growth of Zn/ZnO nanostructures obtained by DC reactive magnetron sputtering
Influence of absolute argon and oxygen flow values at a constant ratio on the growth of Zn/ZnO nanostructures obtained by DC reactive magnetron sputtering
作者
关键词
Reactive magnetron sputtering, Zn, Nanostructures, Gas flow, Oxygen, Impurities
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