Influence of N2, O2, and H2 admixtures on the electron power balance and neutral gas heating in microwave Ar plasmas at atmospheric pressure

标题
Influence of N2, O2, and H2 admixtures on the electron power balance and neutral gas heating in microwave Ar plasmas at atmospheric pressure
作者
关键词
-
出版物
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume -, Issue -, Pages -
出版商
IOP Publishing
发表日期
2019-08-01
DOI
10.1088/1361-6463/ab373a

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