4.8 Article

Redox Layer Deposition of Thin Films of MnO2 on Nanostructured Substrates from Aqueous Solutions

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CHEMISTRY OF MATERIALS
卷 31, 期 13, 页码 4805-4816

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AMER CHEMICAL SOC
DOI: 10.1021/acs.chemmater.9b01219

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  1. imec
  2. IWT-Vlaanderen
  3. BOF-UGent [GOA 01G01513]
  4. Flemish FWO
  5. M-ERA LaminaLion

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In this work, we report a new method for depositing thin films of MnO2 on planar and complex nanostructured surfaces, with high precision and conformality. The method is based on repeating cycles of adsorption of an unsaturated alcohol on a surface, followed by its oxidation with aqueous KMnO4 and formation of thin, solid MnO2. The amount of manganese oxide formed in each cycle is limited by the quantity of the adsorbed alcohol; thus, the growth exhibits the self-limiting characteristics of atomic layer deposition (ALD). Contrary to the typical ALD, however, the new redox layer deposition is performed in air, at room temperature, using common chemicals and simple laboratory glassware, which greatly reduces its cost and complexity. We also demonstrate application of the method for the fabrication of a nanostructured MnO2/Ni electrode, which was not possible with thermal ALD because of the rapid decomposition of the gaseous precursor on the high surface-area substrate. Thanks to its simplicity, the conformal deposition of MnO2 can be easily upscaled and thus exploited for its numerous (electro)chemical applications.

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