Structure evolution and stress transition in diamond-like carbon films by glancing angle deposition

出版年份 2019 全文链接

标题

作者

关键词

Diamond-like carbon film, Stress transition, NEXAFS spectroscopy, Glancing angle deposition

出版物

Volume 479, Issue -, Pages 12-19

出版商

Elsevier BV

发表日期

2019-02-11

DOI

10.1016/j.apsusc.2019.02.063

联系作者

Discuss science. Find collaborators. Network.

Join a conversation

Explore over 38,000 international journals covering a vast array of academic fields.