Article
Engineering, Electrical & Electronic
Do Thi Thu, Zong-Han Liu, Ya-Chu Lee, Tzu-Wen Kuo, Wei-Lun Sung, Yen-Chang Chu, Yu-Lun Chueh, Weileun Fang
Summary: This study designs and implements a chip-scale amperometric ethanol sensor using the standard commercially available CMOS process and post-CMOS micromachining processes. The sensor consists of a suspended plate with a microhole structure as the working electrode, a fully anchored plate with a microhole structure as the counter electrode, and a microcavity as the electrolyte reservoir. By exploiting the metal and dielectric layers in the CMOS process, the sensor achieves enhanced sensitivity and response time. Measurements show that the sensor has a sensing range of ppm (20-1000 ppm) at room temperature, with a sensitivity of 0.01 nA/ppm and a response time of 6 s. The presented design demonstrates the potential of CMOS-MEMS for amperometric ethanol sensing.
IEEE SENSORS JOURNAL
(2023)
Article
Engineering, Electrical & Electronic
Tanya Blank, Igor Brouk, Sharon Bar-Lev, Gavriel Amar, Elie Meimoun, Shlomi Bouscher, Maxim Meltsin, Michele Vaiana, Amedeo Maierna, Maria Eloisa Castagna, Giuseppe Bruno, Yael Nemirovsky
Summary: This paper introduces a novel non-imaging digital passive Infra-Red (PIR) sensing system using a CMOS-SOI-MEMS transistor as the thermal sensor, which surpasses traditional pyroelectric sensors and thermopiles in performance. Manufactured by nano-fabrication methods in standard FABs, the mosaic sensors exhibit enhanced performance and robust manufacturing on wafer level processing and vacuum packaging. Mirror optics replaces Fresnel plastic lenses to provide enhanced performance at low-cost.
IEEE SENSORS JOURNAL
(2021)
Article
Chemistry, Analytical
Chi-Feng Chen, Chih-Hsiung Shen, Yun-Ying Yeh
Summary: The study investigated the IRA effect of sub-wavelength hole arrays (SHAs) in the active area of a thermopile device, revealing that the IRA can be enhanced by considering SHAs. The research showed that different shapes of SHAs impact the infrared absorption efficiencies (IAEs), with structural optimization playing a crucial role in improving IRA.
Article
Nanoscience & Nanotechnology
Joost Romijn, Sten Vollebregt, Luke M. Middelburg, Brahim El Mansouri, Henk W. van Zeijl, Alexander May, Tobias Erlbacher, Johan Leijtens, Guoqi Zhang, Pasqualina M. Sarro
Summary: This work presents the first integration of on-chip UV optoelectronics in 4H-SiC CMOS, including an image sensor with 64 active pixels and 1263 transistors. The image sensor offers serial digital, analog, and 2-bit ADC outputs, operates at 0.39 Hz, and has a maximum power consumption of 60 µW, making significant improvements over previous reports. UV optoelectronics find applications in various fields such as flame detection, satellites, astronomy, UV photography, and healthcare. The complexity of this optoelectronic system opens up possibilities for new applications like harsh environment microcontrollers.
MICROSYSTEMS & NANOENGINEERING
(2022)
Article
Multidisciplinary Sciences
Junchao Zhou, Diana Al Husseini, Junyan Li, Zhihai Lin, Svetlana Sukhishvili, Gerard L. Cote, Ricardo Gutierrez-Osuna, Pao Tai Lin
Summary: In this study, mid-infrared (mid-IR) sensors consisting of silicon nitride (SiN) waveguides were designed and tested for detecting volatile organic compounds (VOCs). The SiN waveguide showed a higher sensitivity compared to conventional materials, such as silicon, and allowed for on-chip monitoring of multiple VOCs. Therefore, the developed waveguide sensor has the potential to be used in various applications related to health, agriculture, and the environment.
SCIENTIFIC REPORTS
(2022)
Article
Chemistry, Analytical
Doris Keh Ting Ng, Chong Pei Ho, Linfang Xu, Weiguo Chen, Yuan Hsing Fu, Tantan Zhang, Li Yan Siow, Norhanani Jaafar, Eldwin Jiaqiang Ng, Yuan Gao, Hong Cai, Qingxin Zhang, Lennon Yao Ting Lee
Summary: In this study, NDIR CO2 gas sensing was demonstrated using CMOS compatible MEMS ScAlN-based pyroelectric detectors. The results showed significant signal change and short gas response times. Introduction of humidity had minor effects on CO2 gas response.
SENSORS AND ACTUATORS B-CHEMICAL
(2021)
Article
Chemistry, Physical
Yuhua Chang, Siyu Xu, Bowei Dong, Jingxuan Wei, Xianhao Le, Yiming Ma, Guangya Zhou, Chengkuo Lee
Summary: Miniaturized optical spectrometers, especially in the mid-infrared (MIR) range, enable fast and on-site detection of molecular fingerprints for selective chemical sensing in healthcare and environmental monitoring. Triboelectric nanogenerator (TENG) technology is essential for wearable self-powered sensors, and the TENG enabled tunable Fabry-Pe 'rot (FP) photonic-crystal-slab filter provides a computational spectrometer in the MIR range. This work demonstrates the potential for a wearable MIR miniaturized optical spectrometer.
Review
Engineering, Electrical & Electronic
Rui M. R. Pinto, Ved Gund, Rosana Alves Dias, K. K. Nagaraja, K. B. Vinayakumar
Summary: This review discusses the applications of aluminum nitride (AlN) in CMOS-integrated MEMS, including comparisons with other common piezoelectric materials, integration strategies, recent demonstrations of AlN-based devices, and other potential applications.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
(2022)
Article
Nanoscience & Nanotechnology
Zahra Rahimian Omam, Amir Ghobadi, Bahram Khalichi, Burak Gunes, Ekmel Ozbay
Summary: This paper presents an optical gas-sensing platform that combines a narrowband thermal emitter with a metamaterial absorber. The platform allows for the detection of various target gases and offers advantages such as low cost, high efficiency, and suitability for multi-gas-sensing platforms.
ACS APPLIED NANO MATERIALS
(2023)
Article
Chemistry, Analytical
Yuefeng Wang, Weiwei Chen, Pengjun Wang, Shixun Dai, Jun Li, Yan Li, Qiang Fu, Tingge Dai, Hui Yu, Jianyi Yang
Summary: A suspended slot chalcogenide glass waveguide gas sensor is proposed, designed, and analyzed in detail, achieving high power confinement factor within a specific wavelength range and demonstrating strong detection performance for methane gas. The optimization of structural parameters leads to improved sensitivity and limit of detection for the proposed waveguide sensor.
SENSORS AND ACTUATORS B-CHEMICAL
(2021)
Article
Nanoscience & Nanotechnology
Avisek Roy, Bao Q. Ta, Mehdi Azadmehr, Knut E. Aasmundtveit
Summary: Carbon nanotubes (CNTs) were successfully grown on custom-designed CMOS microheaters by a thermal chemical vapour deposition (CVD) process. A two-step reactive ion etching (RIE) method and design improvements were employed to achieve high selectivity, uniform etching, and a good etch rate. The CMOS-MEMS microheaters fabricated through this process were utilized for synthesizing CNTs by a local thermal CVD process.
MICROSYSTEMS & NANOENGINEERING
(2023)
Article
Telecommunications
Yang Jing, Cheng Yuhua, Yuan Yupeng, Li Xiaofei, Zhang Zuwei, Xu Ming, Wang Dengpan, Mu Jiangdong, Mei Yong, Zhang Yuzhe
Summary: The Non-Dispersive InfraRed (NDIR) gas sensor is widely used for gas detection, but existing products have issues like large volume, high cost, and lack of integration. This paper presents a novel fully integrated infrared gas sensor structure, optimizing the gas chamber's light structure and flow, and designing a MEMS gas chamber production process. The result is a small volume, high transmissivity gas chamber, essential for producing miniaturized NDIR gas sensors.
DIGITAL COMMUNICATIONS AND NETWORKS
(2021)
Article
Chemistry, Analytical
Thomas Lisec, Ole Behrmann, Bjoern Gojdka
Summary: This paper presents a comprehensive overview of PowderMEMS, a novel back-end-of-line-compatible microfabrication technology. The process involves solidifying micron-sized particles using atomic layer deposition to create three-dimensional microstructures on planar substrates. The technology offers various design possibilities and material choices for functional MEMSs, with potential applications in magnetic, thermal, optical, fluidic, and electrochemical fields.
Review
Nanoscience & Nanotechnology
Tianqi Xu, Yuan Dong, Qize Zhong, Shaonan Zheng, Yang Qiu, Xingyan Zhao, Lianxi Jia, Chengkuo Lee, Ting Hu
Summary: This paper reviews the integrated mid-infrared (MIR) electro-optic (EO) modulators based on different modulation mechanisms and material platforms in MIR photonics. The recent research progress, challenges, and applications of MIR EO modulators are presented and discussed. Several areas in integrated MIR modulators that are worth researching in the future are also provided.
Article
Nanoscience & Nanotechnology
Hong Zhou, Zhihao Ren, Cheng Xu, Liangge Xu, Chengkuo Lee
Summary: This study proposes a hybrid metal-organic framework-polymer physi-chemisorption mechanism integrated with infrared nanoantennas for highly selective and ultrasensitive CO2 detection. Through decorating metal-organic frameworks with amino groups to improve the adsorption capacity for trace amounts of gas molecules and utilizing a multi-hotspot strategy to optimize the sensitivity of nanoantennas, low detection limit, high sensitivity, excellent reversibility, and high selectivity for CO2 detection are achieved.
NANO-MICRO LETTERS
(2022)
Article
Physics, Applied
D. G. Purdie, D. Popa, V. J. Wittwer, Z. Jiang, G. Bonacchini, F. Torrisi, S. Milana, E. Lidorikis, A. C. Ferrari
APPLIED PHYSICS LETTERS
(2015)
Article
Physics, Applied
Z. Zhang, D. Popa, V. J. Wittwer, S. Milana, T. Hasan, Z. Jiang, A. C. Ferrari, F. O. Ilday
APPLIED PHYSICS LETTERS
(2015)
Article
Engineering, Electrical & Electronic
Yingying Ren, Graeme Brown, Rose Mary, Giorgos Demetriou, Daniel Popa, Felice Torrisi, Andrea C. Ferrari, Feng Chen, Ajoy K. Kar
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS
(2015)
Article
Optics
R. I. Woodward, E. J. R. Kelleher, T. H. Runcorn, S. Loranger, D. Popa, V. J. Wittwer, A. C. Ferrari, S. V. Popov, R. Kashyap, J. R. Taylor
Article
Materials Science, Multidisciplinary
Felice Torrisi, Daniel Popa, Silvia Milana, Zhe Jiang, Tawfique Hasan, Elefterios Lidorikis, Andrea C. Ferrari
ADVANCED OPTICAL MATERIALS
(2016)
Article
Chemistry, Multidisciplinary
Tawfique Hasan, Zhipei Sun, PingHeng Tan, Daniel Popa, Emmanuel Flahaut, Edmund J. R. Kelleher, Francesco Bonaccorso, Fengqiu Wang, Zhe Jiang, Felice Torrisi, Giulia Privitera, Valeria Nicolosi, Andrea C. Ferrari
Article
Engineering, Electrical & Electronic
R. I. Woodward, E. J. R. Kelleher, D. Popa, T. Hasan, F. Bonaccorso, A. C. Ferrari, S. V. Popov, J. R. Taylor
IEEE PHOTONICS TECHNOLOGY LETTERS
(2014)
Article
Physics, Applied
B. Fu, D. Popa, Z. Zhao, S. A. Hussain, E. Flahaut, T. Hasan, G. Soavi, A. C. Ferrari
APPLIED PHYSICS LETTERS
(2018)
Article
Optics
Bo Fu, Jin Li, Zhang Cao, Daniel Popa
PHOTONICS RESEARCH
(2019)
Article
Optics
Daniel Popa, Sped Zeeshan Ali, Richard Hoppe, Ying Dai, Florin Udrea
Article
Chemistry, Analytical
Ying Dai, Syed Zeeshan Ali, Richard Hopper, Claudio Falco, Prakash Pandey, Chris Oxley, Daniel Popa, Florin Udrea
Article
Engineering, Electrical & Electronic
Ying Dai, Syed Zeeshan Ali, Richard Hopper, Daniel Popa, Florin Udrea
Summary: This study presents a numerical model for efficient design and optimization of a novel infrared detector array based on MEMS technology. By investigating the effect of heat transfer on the array's performance, we find that optimal operational conditions can be achieved by modifying design elements such as pixel size, heatsinking tracks, and air gaps. Additionally, we demonstrate that the combined effect of copper heatsinking tracks and air gaps can significantly improve responsivity and reduce pixel crosstalk.
IEEE SENSORS JOURNAL
(2022)
Article
Physics, Applied
D. Popa, Z. Jiang, G. E. Bonacchini, Z. Zhao, L. Lombardi, F. Torrisi, A. K. Ott, E. Lidorikis, A. C. Ferrari
APPLIED PHYSICS LETTERS
(2017)
Article
Optics
C. A. Zaugg, Z. Sun, V. J. Wittwer, D. Popa, S. Milana, T. S. Kulmala, R. S. Sundaram, M. Mangold, O. D. Sieber, M. Golling, Y. Lee, J. H. Ahn, A. C. Ferrari, U. Keller
