Catalyzed chemical polishing of SiO2 glasses in pure water

Platinum-catalyzed hydrolysis etching of SiC in water: A density functional theory study

(2018) Pho Van Bui et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

Corrective finishing of extreme ultraviolet photomask blanks by precessed bonnet polisher

(2014) Anthony Beaucamp et al.   APPLIED OPTICS

Chemical composition mapping with nanometre resolution by soft X-ray microscopy

(2014) David A. Shapiro et al.   Nature Photonics

Ultrafast electron dynamics in phenylalanine initiated by attosecond pulses

(2014) F. Calegari et al.   SCIENCE

Mn2O3Slurry Reuse by Circulation Achieving High Constant Removal Rate

(2013) Sadahiro Kishii et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

Planarization of SiC and GaN Wafers Using Polishing Technique Utilizing Catalyst Surface Reaction

(2013) Yasuhisa Sano et al.   ECS Journal of Solid State Science and Technology

Dependence of Process Characteristics on Atomic-Step Density in Catalyst-Referred Etching of 4H–SiC(0001) Surface

(2011) Takeshi Okamoto et al.   JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY

‘Sub-atomic’ resolution of non-contact atomic force microscope images induced by a heterogeneous tip structure: a density functional theory study

(2011) Anna Campbellová et al.   NANOTECHNOLOGY

Nanoscale X-ray imaging

(2010) Anne Sakdinawat et al.   Nature Photonics

Lithography gets extreme

(2009) Christian Wagner et al.   Nature Photonics