Numerical model for the determination of the reduced electric field in a CO2 microwave plasma derived by the principle of impedance matching

标题
Numerical model for the determination of the reduced electric field in a CO2 microwave plasma derived by the principle of impedance matching
作者
关键词
-
出版物
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume -, Issue -, Pages -
出版商
IOP Publishing
发表日期
2019-04-26
DOI
10.1088/1361-6595/ab1ca1

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