Room temperature crystallization of amorphous silicon film by ultrashort femtosecond laser pulses

出版年份 2018 全文链接

标题

作者

关键词

Femtosecond laser annealing, Phase transition, Amorphous silicon film

出版物

Volume 112, Issue -, Pages 363-367

出版商

Elsevier BV

发表日期

2018-11-28

DOI

10.1016/j.optlastec.2018.11.031

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