Structural design and simulation of a micro-gyroscope based on nano-grating detection
出版年份 2019 全文链接
标题
Structural design and simulation of a micro-gyroscope based on nano-grating detection
作者
关键词
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出版物
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Volume 25, Issue 5, Pages 1627-1637
出版商
Springer Science and Business Media LLC
发表日期
2019-04-09
DOI
10.1007/s00542-019-04420-4
参考文献
相关参考文献
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- (2017) Adel Merdassi et al. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
- MEMS Tunable Diffraction Grating for Spaceborne Imaging Spectroscopic Applications
- (2017) Sanathanan Muttikulangara et al. SENSORS
- An Interface ASIC for MEMS Vibratory Gyroscopes With a Power of 1.6 mW, 92 dB DR and 0.007°/s/ $\sqrt {\rm {Hz}} $ Noise Floor Over a 40 Hz Band
- (2016) Stefan Rombach et al. IEEE JOURNAL OF SOLID-STATE CIRCUITS
- Fabrication and characterization of a microaccelerometer based on resonant-tunneling diodes
- (2016) Mengwei Li et al. Journal of Micro-Nanolithography MEMS and MOEMS
- Minimizing cross-axis sensitivity in grating-based optomechanical accelerometers
- (2016) Qianbo Lu et al. OPTICS EXPRESS
- Design and Vibration Sensitivity Analysis of a MEMS Tuning Fork Gyroscope with an Anchored Diamond Coupling Mechanism
- (2016) Yanwei Guan et al. SENSORS
- Design of a Digitalized Microgyroscope System Using $\Sigma \Delta $ Modulation Technology
- (2015) Dunzhu Xia et al. IEEE SENSORS JOURNAL
- Tactical grade MEMS vibrating ring gyroscope with high shock reliability
- (2015) Sungjin Yoon et al. MICROELECTRONIC ENGINEERING
- Tolerance analysis and optimization of a lateral deformable NEMS zeroth-order gratings
- (2015) Chen Wang et al. OPTICS COMMUNICATIONS
- An Automatically Mode-Matched MEMS Gyroscope With Wide and Tunable Bandwidth
- (2014) Soner Sonmezoglu et al. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
- The Development of Micromachined Gyroscope Structure and Circuitry Technology
- (2014) Dunzhu Xia et al. SENSORS
- Closed loop driving and detect circuit of piezoelectric solid-state micro gyroscope
- (2013) Yongsong He et al. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
- Mobile robot localization with gyroscope and constrained Kalman filter
- (2010) Hyun Myung et al. INTERNATIONAL JOURNAL OF CONTROL AUTOMATION AND SYSTEMS
- A Lateral-Axis Microelectromechanical Tuning-Fork Gyroscope With Decoupled Comb Drive Operating at Atmospheric Pressure
- (2010) Zhong Yang Guo et al. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
- Development of wafer scale encapsulation process for large displacement piezoresistive MEMS devices
- (2009) Vipin Ayanoor-Vitikkate et al. SENSORS AND ACTUATORS A-PHYSICAL
- Reflection type heterodyne grating interferometry for in-plane displacement measurement
- (2008) Cheng-Chih Hsu et al. OPTICS COMMUNICATIONS
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