Design, analysis, experiments and kinetic model of a high step efficiency piezoelectric actuator

This paper proposes a novel linear stick-slip piezoelectric actuator with compact structure and a dual-functional flexure hinge mechanism, which can realize motion of high step efficiency, high speed and precision. The flexure hinge mechanism is used in the actuator for realizing parasitic motion and amplifying the displacement of the piezo stacks to enhance the motion performance of the actuator. The structure and the operating principle is described in detail. The pseudo-rigid-body method and the finite element analysis method are adopted in the design process. A series of experiments are carried out based on a manufactured prototype to prove the validity of the proposed actuator, and motion parameters of the prototype are obtained. The resolution of the prototype is 0.594 mu m, the largest velocity is 0.742 mm/s, the largest load capacity is 3.6 kg and the largest step efficiency is 0.934. And a valid kinetic model is established for further investigation and design guide.