A new model for the cantilever MEMS actuator in magnetorheological elastomer cored sandwich form considering the fringing field and Casimir effects

出版年份 2018 全文链接

标题

作者

关键词

MEMS actuator, Sandwich beam, Magnetorheological elastomer, Pull-in voltage, Casimir force, Fringing field

出版物

Volume 121, Issue -, Pages 551-561

出版商

Elsevier BV

发表日期

2018-12-05

DOI

10.1016/j.ymssp.2018.11.046

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