3D characterisation of indentation induced sub-surface cracking in silicon nitride using FIB tomography

出版年份 2019 全文链接

标题

作者

关键词

Focused ion beam (FIB) tomography, Silicon nitride, Cracking, Microindentation

出版物

Volume -, Issue -, Pages -

出版商

Elsevier BV

发表日期

2019-05-11

DOI

10.1016/j.jeurceramsoc.2019.05.012

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