Diamond nanoscale surface processing and tribochemical wear mechanism

标题

作者

关键词

ReaxFF molecular dynamics, Diamond, Tribochemical wear mechanism, CMP, Aqueous H, 2, O, 2

出版物

Volume 94, Issue -, Pages 8-13

出版商

Elsevier BV

发表日期

2019-02-12

DOI

10.1016/j.diamond.2019.02.012

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