Sandwich-structured, damage-resistant TiN/graded TiSiN/TiSiN film

标题
Sandwich-structured, damage-resistant TiN/graded TiSiN/TiSiN film
作者
关键词
TiSiN graded interlayer, Deformation mechanism, Nanoindentation, Finite element method
出版物
Results in Physics
Volume 12, Issue -, Pages 543-554
出版商
Elsevier BV
发表日期
2018-12-08
DOI
10.1016/j.rinp.2018.12.019

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