Effect of varying low substrate temperature on sputtered aluminium films

标题
Effect of varying low substrate temperature on sputtered aluminium films
作者
关键词
-
出版物
Materials Research Express
Volume 6, Issue 5, Pages 056404
出版商
IOP Publishing
发表日期
2019-01-24
DOI
10.1088/2053-1591/ab014a

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