Design, Fabrication, and Testing of a Monolithically Integrated Tri-Axis High-Shock Accelerometer in Single (111)-Silicon Wafer

标题
Design, Fabrication, and Testing of a Monolithically Integrated Tri-Axis High-Shock Accelerometer in Single (111)-Silicon Wafer
作者
关键词
-
出版物
Micromachines
Volume 10, Issue 4, Pages 227
出版商
MDPI AG
发表日期
2019-03-30
DOI
10.3390/mi10040227

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