Development of Pd-Pt functionalized high performance H2 gas sensor based on silicon carbide coated porous silicon for extreme environment applications

出版年份 2018 全文链接

标题

作者

关键词

Porous silicon, Sputtering, SiC thin film, Hydrogen sensor

出版物

SENSORS AND ACTUATORS B-CHEMICAL

Volume 283, Issue -, Pages 373-383

出版商

Elsevier BV

发表日期

2018-12-12

DOI

10.1016/j.snb.2018.12.042

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