Mechanical Behaviors Research and the Structural Design of a Bipolar Electrostatic Actuation Microbeam Resonator
出版年份 2019 全文链接
标题
Mechanical Behaviors Research and the Structural Design of a Bipolar Electrostatic Actuation Microbeam Resonator
作者
关键词
-
出版物
SENSORS
Volume 19, Issue 6, Pages 1348
出版商
MDPI AG
发表日期
2019-03-19
DOI
10.3390/s19061348
参考文献
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