Role of sheath dynamics in multiple double layer formations in expanding RF plasma

标题
Role of sheath dynamics in multiple double layer formations in expanding RF plasma
作者
关键词
-
出版物
PHYSICS OF PLASMAS
Volume 26, Issue 2, Pages 023516
出版商
AIP Publishing
发表日期
2019-02-20
DOI
10.1063/1.5050584

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