Electrothermal application of novolac-derived carbon micropatterns prepared by proton beam lithography and carbonization

出版年份 2018 全文链接

标题

作者

关键词

Carbon micropattern, Novolac, Proton beam lithography, Carbonization, Electric heater

出版物

Volume 471, Issue -, Pages 328-334

出版商

Elsevier BV

发表日期

2018-11-30

DOI

10.1016/j.apsusc.2018.11.236

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