Control over the Phase Formation in Metastable Transition Metal Nitride Thin Films by Tuning the Al+ Subplantation Depth

Unprecedented Al supersaturation in single-phase rock salt structure VAlN films by Al+ subplantation

(2017) G. Greczynski et al.   JOURNAL OF APPLIED PHYSICS

Correlative plasma-surface model for metastable Cr-Al-N: Frenkel pair formation and influence of the stress state on the elastic properties

(2017) Denis Music et al.   JOURNAL OF APPLIED PHYSICS

Extended metastable Al solubility in cubic VAlN by metal-ion bombardment during pulsed magnetron sputtering: film stress vs subplantation

(2017) G. Greczynski et al.   JOURNAL OF APPLIED PHYSICS

Gas rarefaction effects during high power pulsed magnetron sputtering of groups IVb and VIb transition metals in Ar

(2017) Grzegorz Greczynski et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Crystallite size-dependent metastable phase formation of TiAlN coatings

(2017) Marcus Hans et al.   Scientific Reports

Selectable phase formation in VAlN thin films by controlling Al+ subplantation depth

(2017) G. Greczynski et al.   Scientific Reports

Venting temperature determines surface chemistry of magnetron sputtered TiN films

(2016) G. Greczynski et al.   APPLIED PHYSICS LETTERS

A combined segmented anode gas ionization chamber and time-of-flight detector for heavy ion elastic recoil detection analysis

(2016) Petter Ström et al.   REVIEW OF SCIENTIFIC INSTRUMENTS

Peak amplitude of target current determines deposition rate loss during high power pulsed magnetron sputtering

(2016) G. Greczynski et al.   VACUUM

Unprecedented thermal stability of inherently metastable titanium aluminum nitride by point defect engineering

(2016) Moritz to Baben et al.   Materials Research Letters

Control of Ti1−xSixN nanostructure via tunable metal-ion momentum transfer during HIPIMS/DCMS co-deposition

(2015) G. Greczynski et al.   SURFACE & COATINGS TECHNOLOGY

Strategy for tuning the average charge state of metal ions incident at the growing film during HIPIMS deposition

(2015) G. Greczynski et al.   VACUUM

Novel strategy for low-temperature, high-rate growth of dense, hard, and stress-free refractory ceramic thin films

(2014) Grzegorz Greczynski et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Structural and mechanical evolution of reactively and non-reactively sputtered Zr–Al–N thin films during annealing

(2014) P.H. Mayrhofer et al.   SURFACE & COATINGS TECHNOLOGY

Microstructure, chemical states, and mechanical properties of magnetron co-sputtered V1−xAlxN coatings

(2013) Ping Zhu et al.   SURFACE & COATINGS TECHNOLOGY

Nanolabyrinthine ZrAlN thin films by self-organization of interwoven single-crystal cubic and hexagonal phases

(2013) Naureen Ghafoor et al.   APL Materials

Role of Tin+ and Aln+ ion irradiation (n=1, 2) during Ti1-xAlxN alloy film growth in a hybrid HIPIMS/magnetron mode

(2012) G. Greczynski et al.   SURFACE & COATINGS TECHNOLOGY

Phase stability and alloy-related trends in Ti–Al–N, Zr–Al–N and Hf–Al–N systems from first principles

(2011) David Holec et al.   SURFACE & COATINGS TECHNOLOGY

Experimental and computational study on the phase stability of Al-containing cubic transition metal nitrides

(2010) Florian Rovere et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Influence of the aluminum incorporation on the structure of sputtered ZrNx films deposited at low temperatures

(2009) J.J. Araiza et al.   VACUUM

Phase stabilities and thermal decomposition in the Zr1−xAlxN system studied by ab initio calculation and thermodynamic modeling

(2008) S.H. Sheng et al.   ACTA MATERIALIA

Thermal decomposition products in arc evaporated TiAlN/TiN multilayers

(2008) A. Knutsson et al.   APPLIED PHYSICS LETTERS