Effects of tool rake angle and tool nose radius on surface quality of ultraprecision diamond-turned porous silicon

出版年份 2018 全文链接

标题

作者

关键词

Porous materials, Single-crystal silicon, Tool rake angle, Tool nose radius, Ultraprecision cutting, Diamond turning, Surface quality

出版物

Volume 37, Issue -, Pages 321-331

出版商

Elsevier BV

发表日期

2018-12-11

DOI

10.1016/j.jmapro.2018.12.003

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