Ab initio calculations and experimental study of piezoelectric Y x In 1−x N thin films deposited using reactive magnetron sputter epitaxy

标题
Ab initio calculations and experimental study of piezoelectric Y x In 1−x N thin films deposited using reactive magnetron sputter epitaxy
作者
关键词
YInN, Thin films, Sputter deposition, Piezoelectricity, Ab initio calculations
出版物
ACTA MATERIALIA
Volume 105, Issue -, Pages 199-206
出版商
Elsevier BV
发表日期
2015-12-25
DOI
10.1016/j.actamat.2015.11.050

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