Study on the surface damage mechanism of monocrystalline silicon in micro ball-end milling

标题
Study on the surface damage mechanism of monocrystalline silicon in micro ball-end milling
作者
关键词
Micro ball-end milling, Surface damage, Phase transition, Amorphous layer, Residual stress
出版商
Elsevier BV
发表日期
2019-01-22
DOI
10.1016/j.precisioneng.2018.12.003

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