Scalable hollow nanoneedle array using stepper lithography for parallel intracellular delivery

标题
Scalable hollow nanoneedle array using stepper lithography for parallel intracellular delivery
作者
关键词
Hollow needle array, Intracellular delivery, i-Line lithography, Electrokinetic forces, Large-scale production
出版商
Elsevier BV
发表日期
2018-11-03
DOI
10.1016/j.precisioneng.2018.10.014

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