Multilength Scale Patterning of Functional Layers by Roll-to-Roll Ultraviolet-Light-Assisted Nanoimprint Lithography

标题
Multilength Scale Patterning of Functional Layers by Roll-to-Roll Ultraviolet-Light-Assisted Nanoimprint Lithography
作者
关键词
-
出版物
ACS Nano
Volume 10, Issue 5, Pages 4926-4941
出版商
American Chemical Society (ACS)
发表日期
2016-03-30
DOI
10.1021/acsnano.5b07411

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