A Study on the Growth Behavior and Stability of Molecular Layer Deposited Alucone Films Using Diethylene Glycol and Trimethyl Aluminum Precursors, and the Enhancement of Diffusion Barrier Properties by Atomic Layer Deposited Al2O3 Capping

标题
A Study on the Growth Behavior and Stability of Molecular Layer Deposited Alucone Films Using Diethylene Glycol and Trimethyl Aluminum Precursors, and the Enhancement of Diffusion Barrier Properties by Atomic Layer Deposited Al2O3 Capping
作者
关键词
-
出版物
ACS Applied Materials & Interfaces
Volume 8, Issue 19, Pages 12263-12271
出版商
American Chemical Society (ACS)
发表日期
2016-04-27
DOI
10.1021/acsami.6b00762

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