Effect of dielectric and conductive targets on plasma jet behaviour and thin film properties

标题
Effect of dielectric and conductive targets on plasma jet behaviour and thin film properties
作者
关键词
-
出版物
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 52, Issue 7, Pages 074002
出版商
IOP Publishing
发表日期
2018-11-30
DOI
10.1088/1361-6463/aaf4c8

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