期刊
JOURNAL OF LASER MICRO NANOENGINEERING
卷 13, 期 3, 页码 211-215出版社
JAPAN LASER PROCESSING SOC
DOI: 10.2961/jlmn.2018.03.0011
关键词
laser-induced micro plasma; random phase plate; homogenization; flat-top; spiral phase plate; vortex beam; annular laser beam
资金
- Ministry of Education and Science of the Russian Federation [14.587.21.0037 (RFMEFI58717X0037)]
Surface precision processing of Iceland spar and fused silica is shown experimentally by laser-induced microplasma action. The optimal regimes allowed to control the relief depth up to similar to 14 mu m with the step of 50 nm are achieved and discussed. Two types of optical elements (random phase plate and spiral phase plate) are fabricated and tested in laser setups, to change initial intensity distribution (Gaussian) to flat-top and annular, consequently. Flap-top distribution characterized by low speckle modulation, i.e. high quality. The annular distribution corresponds to classical concepts.
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