期刊
IEEE TRANSACTIONS ON ELECTRON DEVICES
卷 66, 期 1, 页码 402-406出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TED.2018.2881220
关键词
Dielectric films; leakage currents; metal-insulator structure; transition metals; work function
资金
- European Project [621217-PANACHE]
- French Government Program Investissements d'Avenir [ANR-10-IQPX-33]
- National Research Foundation of Korea - Korea Government [2018R1C1B5045854]
- National Research Foundation of Korea [2018R1C1B5045854] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
Metal-insulator-metal (MIM) diodes with bulk-limited current conduction asymmetry employing interposed Al2O3 layer in 6-nm-thick HfO2 film have been investigated. The current density is decreased as the Al2O3 layer is located far from the electron injection electrode (i.e., cathode). Also, the work function difference of the electrode does not affect the asymmetry of the MIM diodes. Asymmetry of current conduction is attributed to the control of bulk-limited current conduction by the interposed Al2O3 layer. Physicochemical analysis also confirms the dependence of the location of Al2O3 layer on the bulk-limited current asymmetry.
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