Molecular dynamics and experimental study on comparison between static and dynamic ploughing lithography of single crystal copper

标题
Molecular dynamics and experimental study on comparison between static and dynamic ploughing lithography of single crystal copper
作者
关键词
Atomic force microscopy, Static ploughing lithography, Dynamic ploughing lithography, Single crystal copper, Surface generation
出版物
APPLIED SURFACE SCIENCE
Volume 463, Issue -, Pages 96-104
出版商
Elsevier BV
发表日期
2018-08-24
DOI
10.1016/j.apsusc.2018.08.204

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