A new grating X-ray spectrometer for 2-4 keV enabling a separate observation of In-Lβ and Sn-Lα emissions of indium tin oxide

A new multilayer-coated varied line-spaced grating, JS4000, was fabricated and tested for extending the upper limit of a grating X-ray spectrometer for electron microscopy. This grating was designed for 2-3.8 keV at a grazing incidence angle of 1.35 degrees. It was revealed that this new multilayer structure enables us to take soft-X-ray emission spectra continuously from 1.5 to 4.3 keV at the same optical setting. The full-width at half maximum of Te-L-alpha 1,L-2 (3.8 keV) emission peak was 27 eV. This spectrometer was applied to indium tin oxide particles and clearly resolved Sn-L-alpha (3444 eV) and In-L-beta 1 (3487 eV) peaks, which could not be resolved by a widely used energy-dispersive X-ray spectrometer.